3/16/2012	1:09:51 AM	Helium valve closed
3/16/2012	1:09:51 AM	H2 valve closed
3/16/2012	1:09:51 AM	BCl3 valve closed
3/16/2012	1:09:51 AM	PH3 valve closed
3/16/2012	1:09:51 AM	SiCl4 pre valve closed
3/16/2012	1:09:51 AM	SiCl4 post valve closed
3/16/2012	1:09:51 AM	Main Vac valve closed
3/16/2012	1:09:51 AM	Bypass valve closed
3/16/2012	1:09:51 AM	Bubbler valve closed
3/16/2012	1:09:51 AM	Helium MFC set to  0.000000
3/16/2012	1:09:51 AM	H2 MFC set to  0.000000
3/16/2012	1:09:51 AM	BCl3 MFC set to  0.000000
3/16/2012	1:09:51 AM	PH3 MFC set to  0.000000
3/16/2012	1:09:51 AM	SiCl4 MFC set to  0.000000
3/16/2012	1:09:51 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	1:09:51 AM	Tube furnace set to 0
3/16/2012	1:09:54 AM	Helium valve closed
3/16/2012	1:09:54 AM	BCl3 valve closed
3/16/2012	1:09:54 AM	PH3 valve closed
3/16/2012	1:09:54 AM	SiCl4 pre valve closed
3/16/2012	1:09:54 AM	SiCl4 post valve closed
3/16/2012	1:09:54 AM	Main Vac valve closed
3/16/2012	1:09:54 AM	Bypass valve closed
3/16/2012	1:09:54 AM	Bubbler valve closed
3/16/2012	1:09:54 AM	H2 valve opened
3/16/2012	1:09:54 AM	Helium MFC set to  0.000000
3/16/2012	1:09:54 AM	H2 MFC set to  500.000000
3/16/2012	1:09:54 AM	BCl3 MFC set to  0.000000
3/16/2012	1:09:54 AM	PH3 MFC set to  0.000000
3/16/2012	1:09:54 AM	SiCl4 MFC set to  0.000000
3/16/2012	1:09:54 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	1:09:54 AM	Tube furnace set to 0
3/16/2012	1:11:01 AM	Helium valve closed
3/16/2012	1:11:01 AM	BCl3 valve closed
3/16/2012	1:11:01 AM	PH3 valve closed
3/16/2012	1:11:01 AM	SiCl4 pre valve closed
3/16/2012	1:11:01 AM	SiCl4 post valve closed
3/16/2012	1:11:01 AM	Main Vac valve closed
3/16/2012	1:11:01 AM	Bypass valve closed
3/16/2012	1:11:01 AM	H2 valve opened
3/16/2012	1:11:01 AM	Bubbler valve opened
3/16/2012	1:11:01 AM	Helium MFC set to  0.000000
3/16/2012	1:11:01 AM	H2 MFC set to  500.000000
3/16/2012	1:11:01 AM	BCl3 MFC set to  0.000000
3/16/2012	1:11:01 AM	PH3 MFC set to  0.000000
3/16/2012	1:11:01 AM	SiCl4 MFC set to  0.000000
3/16/2012	1:11:01 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	1:11:01 AM	Tube furnace set to 0
3/16/2012	1:11:02 AM	Helium valve closed
3/16/2012	1:11:02 AM	BCl3 valve closed
3/16/2012	1:11:02 AM	PH3 valve closed
3/16/2012	1:11:02 AM	SiCl4 pre valve closed
3/16/2012	1:11:02 AM	SiCl4 post valve closed
3/16/2012	1:11:02 AM	Main Vac valve closed
3/16/2012	1:11:02 AM	Bypass valve closed
3/16/2012	1:11:02 AM	H2 valve opened
3/16/2012	1:11:02 AM	Bubbler valve opened
3/16/2012	1:11:02 AM	Helium MFC set to  0.000000
3/16/2012	1:11:02 AM	H2 MFC set to  500.000000
3/16/2012	1:11:02 AM	BCl3 MFC set to  0.000000
3/16/2012	1:11:02 AM	PH3 MFC set to  0.000000
3/16/2012	1:11:02 AM	SiCl4 MFC set to  0.000000
3/16/2012	1:11:02 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	1:11:02 AM	Tube furnace set to 1000
3/16/2012	1:36:02 AM	Helium valve closed
3/16/2012	1:36:02 AM	PH3 valve closed
3/16/2012	1:36:02 AM	Main Vac valve closed
3/16/2012	1:36:02 AM	Bypass valve closed
3/16/2012	1:36:02 AM	H2 valve opened
3/16/2012	1:36:02 AM	BCl3 valve opened
3/16/2012	1:36:02 AM	SiCl4 pre valve opened
3/16/2012	1:36:02 AM	SiCl4 post valve opened
3/16/2012	1:36:02 AM	Bubbler valve opened
3/16/2012	1:36:02 AM	Helium MFC set to  0.000000
3/16/2012	1:36:02 AM	H2 MFC set to  450.000000
3/16/2012	1:36:02 AM	BCl3 MFC set to  1.500000
3/16/2012	1:36:02 AM	PH3 MFC set to  0.000000
3/16/2012	1:36:02 AM	SiCl4 MFC set to  50.000000
3/16/2012	1:36:02 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	1:36:02 AM	Tube furnace set to 1000
3/16/2012	1:57:02 AM	Helium valve closed
3/16/2012	1:57:02 AM	BCl3 valve closed
3/16/2012	1:57:02 AM	PH3 valve closed
3/16/2012	1:57:02 AM	SiCl4 pre valve closed
3/16/2012	1:57:02 AM	SiCl4 post valve closed
3/16/2012	1:57:02 AM	Main Vac valve closed
3/16/2012	1:57:02 AM	Bypass valve closed
3/16/2012	1:57:02 AM	H2 valve opened
3/16/2012	1:57:02 AM	Bubbler valve opened
3/16/2012	1:57:02 AM	Helium MFC set to  0.000000
3/16/2012	1:57:02 AM	H2 MFC set to  500.000000
3/16/2012	1:57:02 AM	BCl3 MFC set to  0.000000
3/16/2012	1:57:02 AM	PH3 MFC set to  0.000000
3/16/2012	1:57:02 AM	SiCl4 MFC set to  0.000000
3/16/2012	1:57:02 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	1:57:02 AM	Tube furnace set to 750
3/16/2012	2:12:02 AM	H2 valve closed
3/16/2012	2:12:02 AM	BCl3 valve closed
3/16/2012	2:12:02 AM	PH3 valve closed
3/16/2012	2:12:02 AM	SiCl4 pre valve closed
3/16/2012	2:12:02 AM	SiCl4 post valve closed
3/16/2012	2:12:02 AM	Main Vac valve closed
3/16/2012	2:12:02 AM	Bypass valve closed
3/16/2012	2:12:02 AM	Helium valve opened
3/16/2012	2:12:02 AM	Bubbler valve opened
3/16/2012	2:12:02 AM	Helium MFC set to  500.000000
3/16/2012	2:12:02 AM	H2 MFC set to  0.000000
3/16/2012	2:12:02 AM	BCl3 MFC set to  0.000000
3/16/2012	2:12:02 AM	PH3 MFC set to  0.000000
3/16/2012	2:12:02 AM	SiCl4 MFC set to  0.000000
3/16/2012	2:12:02 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	2:12:02 AM	Tube furnace set to 0
3/16/2012	2:32:03 AM	Helium valve closed
3/16/2012	2:32:03 AM	H2 valve closed
3/16/2012	2:32:03 AM	BCl3 valve closed
3/16/2012	2:32:03 AM	PH3 valve closed
3/16/2012	2:32:03 AM	SiCl4 pre valve closed
3/16/2012	2:32:03 AM	SiCl4 post valve closed
3/16/2012	2:32:03 AM	Main Vac valve closed
3/16/2012	2:32:03 AM	Bypass valve closed
3/16/2012	2:32:03 AM	Bubbler valve closed
3/16/2012	2:32:03 AM	Helium MFC set to  0.000000
3/16/2012	2:32:03 AM	H2 MFC set to  0.000000
3/16/2012	2:32:03 AM	BCl3 MFC set to  0.000000
3/16/2012	2:32:03 AM	PH3 MFC set to  0.000000
3/16/2012	2:32:03 AM	SiCl4 MFC set to  0.000000
3/16/2012	2:32:03 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	2:32:03 AM	Tube furnace set to 0
3/16/2012	2:52:03 AM	Helium valve closed
3/16/2012	2:52:03 AM	H2 valve closed
3/16/2012	2:52:03 AM	BCl3 valve closed
3/16/2012	2:52:03 AM	PH3 valve closed
3/16/2012	2:52:03 AM	SiCl4 pre valve closed
3/16/2012	2:52:03 AM	SiCl4 post valve closed
3/16/2012	2:52:03 AM	Main Vac valve closed
3/16/2012	2:52:03 AM	Bubbler valve closed
3/16/2012	2:52:03 AM	Bypass valve opened
3/16/2012	2:52:03 AM	Helium MFC set to  0.000000
3/16/2012	2:52:03 AM	H2 MFC set to  0.000000
3/16/2012	2:52:03 AM	BCl3 MFC set to  0.000000
3/16/2012	2:52:03 AM	PH3 MFC set to  0.000000
3/16/2012	2:52:03 AM	SiCl4 MFC set to  0.000000
3/16/2012	2:52:03 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	2:52:03 AM	Tube furnace set to 0
3/16/2012	2:52:48 AM	Helium valve closed
3/16/2012	2:52:48 AM	H2 valve closed
3/16/2012	2:52:48 AM	BCl3 valve closed
3/16/2012	2:52:48 AM	PH3 valve closed
3/16/2012	2:52:48 AM	SiCl4 pre valve closed
3/16/2012	2:52:48 AM	SiCl4 post valve closed
3/16/2012	2:52:48 AM	Main Vac valve closed
3/16/2012	2:52:48 AM	Bubbler valve closed
3/16/2012	2:52:48 AM	Bypass valve opened
3/16/2012	2:52:48 AM	Helium MFC set to  0.000000
3/16/2012	2:52:48 AM	H2 MFC set to  0.000000
3/16/2012	2:52:48 AM	BCl3 MFC set to  0.000000
3/16/2012	2:52:48 AM	PH3 MFC set to  0.000000
3/16/2012	2:52:48 AM	SiCl4 MFC set to  0.000000
3/16/2012	2:52:48 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	2:52:48 AM	Tube furnace set to 0
3/16/2012	2:53:48 AM	Helium valve closed
3/16/2012	2:53:48 AM	H2 valve closed
3/16/2012	2:53:48 AM	BCl3 valve closed
3/16/2012	2:53:48 AM	PH3 valve closed
3/16/2012	2:53:48 AM	SiCl4 pre valve closed
3/16/2012	2:53:48 AM	SiCl4 post valve closed
3/16/2012	2:53:48 AM	Bypass valve closed
3/16/2012	2:53:48 AM	Bubbler valve closed
3/16/2012	2:53:48 AM	Main Vac valve opened
3/16/2012	2:53:48 AM	Helium MFC set to  0.000000
3/16/2012	2:53:48 AM	H2 MFC set to  0.000000
3/16/2012	2:53:48 AM	BCl3 MFC set to  0.000000
3/16/2012	2:53:48 AM	PH3 MFC set to  0.000000
3/16/2012	2:53:48 AM	SiCl4 MFC set to  0.000000
3/16/2012	2:53:48 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	2:53:48 AM	Tube furnace set to 0
3/16/2012	3:53:48 AM	Run finished at 3:53 AM
3/16/2012	9:25:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2012	9:25:25 AM	Recipe started at 9:25 AM
3/16/2012	9:25:25 AM	Helium valve closed
3/16/2012	9:25:25 AM	H2 valve closed
3/16/2012	9:25:25 AM	BCl3 valve closed
3/16/2012	9:25:25 AM	PH3 valve closed
3/16/2012	9:25:25 AM	SiCl4 pre valve closed
3/16/2012	9:25:25 AM	SiCl4 post valve closed
3/16/2012	9:25:25 AM	Main Vac valve closed
3/16/2012	9:25:25 AM	Bypass valve closed
3/16/2012	9:25:25 AM	Bubbler valve closed
3/16/2012	9:25:25 AM	Helium MFC set to  0.000000
3/16/2012	9:25:25 AM	H2 MFC set to  0.000000
3/16/2012	9:25:25 AM	BCl3 MFC set to  0.000000
3/16/2012	9:25:25 AM	PH3 MFC set to  0.000000
3/16/2012	9:25:25 AM	SiCl4 MFC set to  0.000000
3/16/2012	9:25:25 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	9:25:25 AM	Tube furnace set to 0
3/16/2012	9:25:28 AM	H2 valve closed
3/16/2012	9:25:28 AM	BCl3 valve closed
3/16/2012	9:25:28 AM	PH3 valve closed
3/16/2012	9:25:28 AM	SiCl4 pre valve closed
3/16/2012	9:25:28 AM	SiCl4 post valve closed
3/16/2012	9:25:28 AM	Main Vac valve closed
3/16/2012	9:25:28 AM	Bypass valve closed
3/16/2012	9:25:28 AM	Bubbler valve closed
3/16/2012	9:25:28 AM	Helium valve opened
3/16/2012	9:25:28 AM	Helium MFC set to  500.000000
3/16/2012	9:25:28 AM	H2 MFC set to  0.000000
3/16/2012	9:25:28 AM	BCl3 MFC set to  0.000000
3/16/2012	9:25:28 AM	PH3 MFC set to  0.000000
3/16/2012	9:25:28 AM	SiCl4 MFC set to  0.000000
3/16/2012	9:25:28 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	9:25:28 AM	Tube furnace set to 0
3/16/2012	9:26:33 AM	Helium valve closed
3/16/2012	9:26:33 AM	H2 valve closed
3/16/2012	9:26:33 AM	BCl3 valve closed
3/16/2012	9:26:33 AM	PH3 valve closed
3/16/2012	9:26:33 AM	SiCl4 pre valve closed
3/16/2012	9:26:33 AM	SiCl4 post valve closed
3/16/2012	9:26:33 AM	Main Vac valve closed
3/16/2012	9:26:33 AM	Bypass valve closed
3/16/2012	9:26:33 AM	Bubbler valve closed
3/16/2012	9:26:33 AM	Helium MFC set to  0.000000
3/16/2012	9:26:33 AM	H2 MFC set to  0.000000
3/16/2012	9:26:33 AM	BCl3 MFC set to  0.000000
3/16/2012	9:26:33 AM	PH3 MFC set to  0.000000
3/16/2012	9:26:33 AM	SiCl4 MFC set to  0.000000
3/16/2012	9:26:33 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	9:26:33 AM	Tube furnace set to 0
3/16/2012	9:26:34 AM	Run finished at 9:26 AM
3/16/2012	9:26:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2012	9:29:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2012	9:29:39 AM	Recipe started at 9:29 AM
3/16/2012	9:29:39 AM	Helium valve closed
3/16/2012	9:29:39 AM	H2 valve closed
3/16/2012	9:29:39 AM	BCl3 valve closed
3/16/2012	9:29:39 AM	PH3 valve closed
3/16/2012	9:29:39 AM	SiCl4 pre valve closed
3/16/2012	9:29:39 AM	SiCl4 post valve closed
3/16/2012	9:29:39 AM	Main Vac valve closed
3/16/2012	9:29:39 AM	Bubbler valve closed
3/16/2012	9:29:39 AM	Bypass valve opened
3/16/2012	9:29:39 AM	Helium MFC set to  0.000000
3/16/2012	9:29:39 AM	H2 MFC set to  0.000000
3/16/2012	9:29:39 AM	BCl3 MFC set to  0.000000
3/16/2012	9:29:39 AM	PH3 MFC set to  0.000000
3/16/2012	9:29:39 AM	SiCl4 MFC set to  0.000000
3/16/2012	9:29:39 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	9:29:39 AM	Tube furnace set to 0
3/16/2012	9:30:40 AM	Helium valve closed
3/16/2012	9:30:40 AM	H2 valve closed
3/16/2012	9:30:40 AM	BCl3 valve closed
3/16/2012	9:30:40 AM	PH3 valve closed
3/16/2012	9:30:40 AM	SiCl4 pre valve closed
3/16/2012	9:30:40 AM	SiCl4 post valve closed
3/16/2012	9:30:40 AM	Main Vac valve closed
3/16/2012	9:30:40 AM	Bubbler valve closed
3/16/2012	9:30:40 AM	Bypass valve opened
3/16/2012	9:30:40 AM	Helium MFC set to  0.000000
3/16/2012	9:30:40 AM	H2 MFC set to  0.000000
3/16/2012	9:30:40 AM	BCl3 MFC set to  0.000000
3/16/2012	9:30:40 AM	PH3 MFC set to  0.000000
3/16/2012	9:30:40 AM	SiCl4 MFC set to  0.000000
3/16/2012	9:30:40 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	9:30:40 AM	Tube furnace set to 0
3/16/2012	9:31:40 AM	Helium valve closed
3/16/2012	9:31:40 AM	H2 valve closed
3/16/2012	9:31:40 AM	BCl3 valve closed
3/16/2012	9:31:40 AM	PH3 valve closed
3/16/2012	9:31:40 AM	SiCl4 pre valve closed
3/16/2012	9:31:40 AM	SiCl4 post valve closed
3/16/2012	9:31:40 AM	Bypass valve closed
3/16/2012	9:31:40 AM	Bubbler valve closed
3/16/2012	9:31:40 AM	Main Vac valve opened
3/16/2012	9:31:40 AM	Helium MFC set to  0.000000
3/16/2012	9:31:40 AM	H2 MFC set to  0.000000
3/16/2012	9:31:40 AM	BCl3 MFC set to  0.000000
3/16/2012	9:31:40 AM	PH3 MFC set to  0.000000
3/16/2012	9:31:40 AM	SiCl4 MFC set to  0.000000
3/16/2012	9:31:40 AM	Bypass solenoid MFC set to  0.000000
3/16/2012	9:31:40 AM	Tube furnace set to 0
3/16/2012	9:31:41 AM	Run finished at 9:31 AM
3/16/2012	9:31:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2012	11:53:28 AM	Helium valve closed
3/16/2012	11:53:28 AM	H2 valve closed
3/16/2012	11:53:28 AM	BCl3 valve closed
3/16/2012	11:53:28 AM	PH3 valve closed
3/16/2012	11:53:28 AM	SiCl4 pre valve closed
3/16/2012	11:53:28 AM	SiCl4 post valve closed
3/16/2012	11:53:28 AM	Main Vac valve closed
3/16/2012	11:53:28 AM	Bypass valve closed
3/16/2012	11:53:28 AM	Bubbler valve closed
3/16/2012	11:53:28 AM	Helium MFC set to  0.000000
3/16/2012	11:53:28 AM	H2 MFC set to  0.000000
3/16/2012	11:53:28 AM	BCl3 MFC set to  0.000000
3/16/2012	11:53:28 AM	PH3 MFC set to  0.000000
3/16/2012	11:53:28 AM	SiCl4 MFC set to  0.000000
3/16/2012	11:53:28 AM	Bypass solenoid MFC set to  760.000000
3/16/2012	11:53:28 AM	Tube furnace set to 0
3/16/2012	11:53:29 AM	Main Vac valve opened
3/16/2012	11:53:30 AM	Main Vac valve closed
3/16/2012	11:53:31 AM	Main Vac valve opened
3/16/2012	11:56:16 AM	Main Vac valve closed
3/16/2012	11:56:17 AM	Main Vac valve opened
3/16/2012	12:12:23 PM	Main Vac valve closed
3/16/2012	12:12:25 PM	Main Vac valve opened
3/16/2012	2:36:39 PM	Helium valve closed
3/16/2012	2:36:39 PM	H2 valve closed
3/16/2012	2:36:39 PM	BCl3 valve closed
3/16/2012	2:36:39 PM	PH3 valve closed
3/16/2012	2:36:39 PM	SiCl4 pre valve closed
3/16/2012	2:36:39 PM	SiCl4 post valve closed
3/16/2012	2:36:39 PM	Main Vac valve closed
3/16/2012	2:36:39 PM	Bypass valve closed
3/16/2012	2:36:39 PM	Bubbler valve closed
3/16/2012	2:36:39 PM	Helium MFC set to  0.000000
3/16/2012	2:36:39 PM	H2 MFC set to  0.000000
3/16/2012	2:36:39 PM	BCl3 MFC set to  0.000000
3/16/2012	2:36:39 PM	PH3 MFC set to  0.000000
3/16/2012	2:36:39 PM	SiCl4 MFC set to  0.000000
3/16/2012	2:36:39 PM	Bypass solenoid MFC set to  760.000000
3/16/2012	2:36:40 PM	Tube furnace set to 0
3/16/2012	2:36:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2012	2:36:44 PM	Recipe started at 2:36 PM
3/16/2012	2:36:44 PM	Helium valve closed
3/16/2012	2:36:44 PM	H2 valve closed
3/16/2012	2:36:44 PM	BCl3 valve closed
3/16/2012	2:36:44 PM	PH3 valve closed
3/16/2012	2:36:44 PM	SiCl4 pre valve closed
3/16/2012	2:36:44 PM	SiCl4 post valve closed
3/16/2012	2:36:44 PM	Main Vac valve closed
3/16/2012	2:36:44 PM	Bypass valve closed
3/16/2012	2:36:44 PM	Bubbler valve closed
3/16/2012	2:36:44 PM	Helium MFC set to  0.000000
3/16/2012	2:36:44 PM	H2 MFC set to  0.000000
3/16/2012	2:36:44 PM	BCl3 MFC set to  0.000000
3/16/2012	2:36:44 PM	PH3 MFC set to  0.000000
3/16/2012	2:36:44 PM	SiCl4 MFC set to  0.000000
3/16/2012	2:36:44 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	2:36:45 PM	Tube furnace set to 0
3/16/2012	2:36:48 PM	H2 valve closed
3/16/2012	2:36:48 PM	BCl3 valve closed
3/16/2012	2:36:48 PM	PH3 valve closed
3/16/2012	2:36:48 PM	SiCl4 pre valve closed
3/16/2012	2:36:48 PM	SiCl4 post valve closed
3/16/2012	2:36:48 PM	Main Vac valve closed
3/16/2012	2:36:48 PM	Bypass valve closed
3/16/2012	2:36:48 PM	Bubbler valve closed
3/16/2012	2:36:48 PM	Helium valve opened
3/16/2012	2:36:48 PM	Helium MFC set to  500.000000
3/16/2012	2:36:48 PM	H2 MFC set to  0.000000
3/16/2012	2:36:48 PM	BCl3 MFC set to  0.000000
3/16/2012	2:36:48 PM	PH3 MFC set to  0.000000
3/16/2012	2:36:48 PM	SiCl4 MFC set to  0.000000
3/16/2012	2:36:48 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	2:36:49 PM	Tube furnace set to 0
3/16/2012	2:37:54 PM	Helium valve closed
3/16/2012	2:37:54 PM	H2 valve closed
3/16/2012	2:37:54 PM	BCl3 valve closed
3/16/2012	2:37:54 PM	PH3 valve closed
3/16/2012	2:37:54 PM	SiCl4 pre valve closed
3/16/2012	2:37:54 PM	SiCl4 post valve closed
3/16/2012	2:37:54 PM	Main Vac valve closed
3/16/2012	2:37:54 PM	Bypass valve closed
3/16/2012	2:37:54 PM	Bubbler valve closed
3/16/2012	2:37:54 PM	Helium MFC set to  0.000000
3/16/2012	2:37:54 PM	H2 MFC set to  0.000000
3/16/2012	2:37:54 PM	BCl3 MFC set to  0.000000
3/16/2012	2:37:54 PM	PH3 MFC set to  0.000000
3/16/2012	2:37:54 PM	SiCl4 MFC set to  0.000000
3/16/2012	2:37:54 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	2:37:54 PM	Tube furnace set to 0
3/16/2012	2:37:55 PM	Run finished at 2:37 PM
3/16/2012	2:37:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2012	2:46:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2012	2:46:21 PM	Recipe started at 2:46 PM
3/16/2012	2:46:21 PM	Helium valve closed
3/16/2012	2:46:21 PM	H2 valve closed
3/16/2012	2:46:21 PM	BCl3 valve closed
3/16/2012	2:46:21 PM	PH3 valve closed
3/16/2012	2:46:21 PM	SiCl4 pre valve closed
3/16/2012	2:46:21 PM	SiCl4 post valve closed
3/16/2012	2:46:21 PM	Main Vac valve closed
3/16/2012	2:46:21 PM	Bubbler valve closed
3/16/2012	2:46:21 PM	Bypass valve opened
3/16/2012	2:46:21 PM	Helium MFC set to  0.000000
3/16/2012	2:46:21 PM	H2 MFC set to  0.000000
3/16/2012	2:46:21 PM	BCl3 MFC set to  0.000000
3/16/2012	2:46:21 PM	PH3 MFC set to  0.000000
3/16/2012	2:46:21 PM	SiCl4 MFC set to  0.000000
3/16/2012	2:46:21 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	2:46:21 PM	Tube furnace set to 0
3/16/2012	2:47:23 PM	Helium valve closed
3/16/2012	2:47:23 PM	H2 valve closed
3/16/2012	2:47:23 PM	BCl3 valve closed
3/16/2012	2:47:23 PM	PH3 valve closed
3/16/2012	2:47:23 PM	SiCl4 pre valve closed
3/16/2012	2:47:23 PM	SiCl4 post valve closed
3/16/2012	2:47:23 PM	Main Vac valve closed
3/16/2012	2:47:23 PM	Bubbler valve closed
3/16/2012	2:47:23 PM	Bypass valve opened
3/16/2012	2:47:23 PM	Helium MFC set to  0.000000
3/16/2012	2:47:23 PM	H2 MFC set to  0.000000
3/16/2012	2:47:23 PM	BCl3 MFC set to  0.000000
3/16/2012	2:47:23 PM	PH3 MFC set to  0.000000
3/16/2012	2:47:23 PM	SiCl4 MFC set to  0.000000
3/16/2012	2:47:23 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	2:47:23 PM	Tube furnace set to 0
3/16/2012	2:48:23 PM	Helium valve closed
3/16/2012	2:48:23 PM	H2 valve closed
3/16/2012	2:48:23 PM	BCl3 valve closed
3/16/2012	2:48:23 PM	PH3 valve closed
3/16/2012	2:48:23 PM	SiCl4 pre valve closed
3/16/2012	2:48:23 PM	SiCl4 post valve closed
3/16/2012	2:48:23 PM	Bypass valve closed
3/16/2012	2:48:23 PM	Bubbler valve closed
3/16/2012	2:48:23 PM	Main Vac valve opened
3/16/2012	2:48:23 PM	Helium MFC set to  0.000000
3/16/2012	2:48:23 PM	H2 MFC set to  0.000000
3/16/2012	2:48:23 PM	BCl3 MFC set to  0.000000
3/16/2012	2:48:23 PM	PH3 MFC set to  0.000000
3/16/2012	2:48:23 PM	SiCl4 MFC set to  0.000000
3/16/2012	2:48:23 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	2:48:24 PM	Tube furnace set to 0
3/16/2012	2:48:25 PM	Run finished at 2:48 PM
3/16/2012	2:48:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2012	3:10:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/16/2012	3:10:33 PM	Recipe started at 3:10 PM
3/16/2012	3:10:33 PM	Helium valve closed
3/16/2012	3:10:33 PM	H2 valve closed
3/16/2012	3:10:33 PM	BCl3 valve closed
3/16/2012	3:10:33 PM	PH3 valve closed
3/16/2012	3:10:33 PM	SiCl4 pre valve closed
3/16/2012	3:10:33 PM	SiCl4 post valve closed
3/16/2012	3:10:33 PM	Main Vac valve closed
3/16/2012	3:10:33 PM	Bubbler valve closed
3/16/2012	3:10:33 PM	Bypass valve opened
3/16/2012	3:10:33 PM	Helium MFC set to  0.000000
3/16/2012	3:10:33 PM	H2 MFC set to  0.000000
3/16/2012	3:10:33 PM	BCl3 MFC set to  0.000000
3/16/2012	3:10:33 PM	PH3 MFC set to  0.000000
3/16/2012	3:10:33 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:10:33 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:10:34 PM	Tube furnace set to 0
3/16/2012	3:10:34 PM	Helium valve closed
3/16/2012	3:10:34 PM	H2 valve closed
3/16/2012	3:10:34 PM	BCl3 valve closed
3/16/2012	3:10:34 PM	PH3 valve closed
3/16/2012	3:10:34 PM	SiCl4 pre valve closed
3/16/2012	3:10:34 PM	SiCl4 post valve closed
3/16/2012	3:10:34 PM	Main Vac valve closed
3/16/2012	3:10:34 PM	Bubbler valve closed
3/16/2012	3:10:34 PM	Bypass valve opened
3/16/2012	3:10:34 PM	Helium MFC set to  0.000000
3/16/2012	3:10:34 PM	H2 MFC set to  0.000000
3/16/2012	3:10:34 PM	BCl3 MFC set to  0.000000
3/16/2012	3:10:34 PM	PH3 MFC set to  0.000000
3/16/2012	3:10:34 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:10:34 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:10:34 PM	Tube furnace set to 0
3/16/2012	3:10:40 PM	Helium valve closed
3/16/2012	3:10:40 PM	H2 valve closed
3/16/2012	3:10:40 PM	BCl3 valve closed
3/16/2012	3:10:40 PM	PH3 valve closed
3/16/2012	3:10:40 PM	SiCl4 pre valve closed
3/16/2012	3:10:40 PM	SiCl4 post valve closed
3/16/2012	3:10:40 PM	Bypass valve closed
3/16/2012	3:10:40 PM	Bubbler valve closed
3/16/2012	3:10:40 PM	Main Vac valve opened
3/16/2012	3:10:40 PM	Helium MFC set to  0.000000
3/16/2012	3:10:40 PM	H2 MFC set to  0.000000
3/16/2012	3:10:40 PM	BCl3 MFC set to  0.000000
3/16/2012	3:10:40 PM	PH3 MFC set to  0.000000
3/16/2012	3:10:40 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:10:40 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:10:40 PM	Tube furnace set to 0
3/16/2012	3:10:41 PM	H2 valve closed
3/16/2012	3:10:41 PM	BCl3 valve closed
3/16/2012	3:10:41 PM	PH3 valve closed
3/16/2012	3:10:41 PM	SiCl4 pre valve closed
3/16/2012	3:10:41 PM	SiCl4 post valve closed
3/16/2012	3:10:41 PM	Bypass valve closed
3/16/2012	3:10:41 PM	Bubbler valve closed
3/16/2012	3:10:41 PM	Helium valve opened
3/16/2012	3:10:41 PM	Main Vac valve opened
3/16/2012	3:10:41 PM	Helium MFC set to  20.000000
3/16/2012	3:10:41 PM	H2 MFC set to  0.000000
3/16/2012	3:10:41 PM	BCl3 MFC set to  0.000000
3/16/2012	3:10:41 PM	PH3 MFC set to  0.000000
3/16/2012	3:10:41 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:10:41 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:10:41 PM	Tube furnace set to 0
3/16/2012	3:11:11 PM	Helium valve closed
3/16/2012	3:11:11 PM	H2 valve closed
3/16/2012	3:11:11 PM	BCl3 valve closed
3/16/2012	3:11:11 PM	PH3 valve closed
3/16/2012	3:11:11 PM	SiCl4 pre valve closed
3/16/2012	3:11:11 PM	SiCl4 post valve closed
3/16/2012	3:11:11 PM	Bypass valve closed
3/16/2012	3:11:11 PM	Bubbler valve closed
3/16/2012	3:11:11 PM	Main Vac valve opened
3/16/2012	3:11:11 PM	Helium MFC set to  0.000000
3/16/2012	3:11:11 PM	H2 MFC set to  0.000000
3/16/2012	3:11:11 PM	BCl3 MFC set to  0.000000
3/16/2012	3:11:11 PM	PH3 MFC set to  0.000000
3/16/2012	3:11:11 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:11:11 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:11:11 PM	Tube furnace set to 0
3/16/2012	3:11:41 PM	H2 valve closed
3/16/2012	3:11:41 PM	BCl3 valve closed
3/16/2012	3:11:41 PM	PH3 valve closed
3/16/2012	3:11:41 PM	SiCl4 pre valve closed
3/16/2012	3:11:41 PM	SiCl4 post valve closed
3/16/2012	3:11:41 PM	Bypass valve closed
3/16/2012	3:11:41 PM	Bubbler valve closed
3/16/2012	3:11:41 PM	Helium valve opened
3/16/2012	3:11:41 PM	Main Vac valve opened
3/16/2012	3:11:41 PM	Helium MFC set to  20.000000
3/16/2012	3:11:41 PM	H2 MFC set to  0.000000
3/16/2012	3:11:41 PM	BCl3 MFC set to  0.000000
3/16/2012	3:11:41 PM	PH3 MFC set to  0.000000
3/16/2012	3:11:41 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:11:41 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:11:41 PM	Tube furnace set to 0
3/16/2012	3:12:11 PM	Helium valve closed
3/16/2012	3:12:11 PM	H2 valve closed
3/16/2012	3:12:11 PM	BCl3 valve closed
3/16/2012	3:12:11 PM	PH3 valve closed
3/16/2012	3:12:11 PM	SiCl4 pre valve closed
3/16/2012	3:12:11 PM	SiCl4 post valve closed
3/16/2012	3:12:11 PM	Bypass valve closed
3/16/2012	3:12:11 PM	Bubbler valve closed
3/16/2012	3:12:11 PM	Main Vac valve opened
3/16/2012	3:12:11 PM	Helium MFC set to  0.000000
3/16/2012	3:12:11 PM	H2 MFC set to  0.000000
3/16/2012	3:12:11 PM	BCl3 MFC set to  0.000000
3/16/2012	3:12:11 PM	PH3 MFC set to  0.000000
3/16/2012	3:12:11 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:12:11 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:12:11 PM	Tube furnace set to 0
3/16/2012	3:12:41 PM	H2 valve closed
3/16/2012	3:12:41 PM	BCl3 valve closed
3/16/2012	3:12:41 PM	PH3 valve closed
3/16/2012	3:12:41 PM	SiCl4 pre valve closed
3/16/2012	3:12:41 PM	SiCl4 post valve closed
3/16/2012	3:12:41 PM	Bypass valve closed
3/16/2012	3:12:41 PM	Bubbler valve closed
3/16/2012	3:12:41 PM	Helium valve opened
3/16/2012	3:12:42 PM	Main Vac valve opened
3/16/2012	3:12:42 PM	Helium MFC set to  20.000000
3/16/2012	3:12:42 PM	H2 MFC set to  0.000000
3/16/2012	3:12:42 PM	BCl3 MFC set to  0.000000
3/16/2012	3:12:42 PM	PH3 MFC set to  0.000000
3/16/2012	3:12:42 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:12:42 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:12:42 PM	Tube furnace set to 0
3/16/2012	3:13:12 PM	Helium valve closed
3/16/2012	3:13:12 PM	H2 valve closed
3/16/2012	3:13:12 PM	BCl3 valve closed
3/16/2012	3:13:12 PM	PH3 valve closed
3/16/2012	3:13:12 PM	SiCl4 pre valve closed
3/16/2012	3:13:12 PM	SiCl4 post valve closed
3/16/2012	3:13:12 PM	Bypass valve closed
3/16/2012	3:13:12 PM	Bubbler valve closed
3/16/2012	3:13:12 PM	Main Vac valve opened
3/16/2012	3:13:12 PM	Helium MFC set to  0.000000
3/16/2012	3:13:12 PM	H2 MFC set to  0.000000
3/16/2012	3:13:12 PM	BCl3 MFC set to  0.000000
3/16/2012	3:13:12 PM	PH3 MFC set to  0.000000
3/16/2012	3:13:12 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:13:12 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:13:12 PM	Tube furnace set to 0
3/16/2012	3:13:42 PM	H2 valve closed
3/16/2012	3:13:42 PM	BCl3 valve closed
3/16/2012	3:13:42 PM	PH3 valve closed
3/16/2012	3:13:42 PM	SiCl4 pre valve closed
3/16/2012	3:13:42 PM	SiCl4 post valve closed
3/16/2012	3:13:42 PM	Bypass valve closed
3/16/2012	3:13:42 PM	Bubbler valve closed
3/16/2012	3:13:42 PM	Helium valve opened
3/16/2012	3:13:42 PM	Main Vac valve opened
3/16/2012	3:13:42 PM	Helium MFC set to  20.000000
3/16/2012	3:13:42 PM	H2 MFC set to  0.000000
3/16/2012	3:13:42 PM	BCl3 MFC set to  0.000000
3/16/2012	3:13:42 PM	PH3 MFC set to  0.000000
3/16/2012	3:13:42 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:13:42 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:13:42 PM	Tube furnace set to 0
3/16/2012	3:14:12 PM	Helium valve closed
3/16/2012	3:14:12 PM	H2 valve closed
3/16/2012	3:14:12 PM	BCl3 valve closed
3/16/2012	3:14:12 PM	PH3 valve closed
3/16/2012	3:14:12 PM	SiCl4 pre valve closed
3/16/2012	3:14:12 PM	SiCl4 post valve closed
3/16/2012	3:14:12 PM	Bypass valve closed
3/16/2012	3:14:12 PM	Bubbler valve closed
3/16/2012	3:14:12 PM	Main Vac valve opened
3/16/2012	3:14:12 PM	Helium MFC set to  0.000000
3/16/2012	3:14:12 PM	H2 MFC set to  0.000000
3/16/2012	3:14:12 PM	BCl3 MFC set to  0.000000
3/16/2012	3:14:12 PM	PH3 MFC set to  0.000000
3/16/2012	3:14:12 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:14:12 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:14:12 PM	Tube furnace set to 0
3/16/2012	3:14:42 PM	H2 valve closed
3/16/2012	3:14:42 PM	BCl3 valve closed
3/16/2012	3:14:42 PM	PH3 valve closed
3/16/2012	3:14:42 PM	SiCl4 pre valve closed
3/16/2012	3:14:42 PM	SiCl4 post valve closed
3/16/2012	3:14:42 PM	Bypass valve closed
3/16/2012	3:14:42 PM	Bubbler valve closed
3/16/2012	3:14:42 PM	Helium valve opened
3/16/2012	3:14:42 PM	Main Vac valve opened
3/16/2012	3:14:42 PM	Helium MFC set to  20.000000
3/16/2012	3:14:42 PM	H2 MFC set to  0.000000
3/16/2012	3:14:42 PM	BCl3 MFC set to  0.000000
3/16/2012	3:14:42 PM	PH3 MFC set to  0.000000
3/16/2012	3:14:42 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:14:42 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:14:43 PM	Tube furnace set to 0
3/16/2012	3:15:13 PM	Helium valve closed
3/16/2012	3:15:13 PM	H2 valve closed
3/16/2012	3:15:13 PM	BCl3 valve closed
3/16/2012	3:15:13 PM	PH3 valve closed
3/16/2012	3:15:13 PM	SiCl4 pre valve closed
3/16/2012	3:15:13 PM	SiCl4 post valve closed
3/16/2012	3:15:13 PM	Bypass valve closed
3/16/2012	3:15:13 PM	Bubbler valve closed
3/16/2012	3:15:13 PM	Main Vac valve opened
3/16/2012	3:15:13 PM	Helium MFC set to  0.000000
3/16/2012	3:15:13 PM	H2 MFC set to  0.000000
3/16/2012	3:15:13 PM	BCl3 MFC set to  0.000000
3/16/2012	3:15:13 PM	PH3 MFC set to  0.000000
3/16/2012	3:15:13 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:15:13 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:15:13 PM	Tube furnace set to 0
3/16/2012	3:15:43 PM	H2 valve closed
3/16/2012	3:15:43 PM	BCl3 valve closed
3/16/2012	3:15:43 PM	PH3 valve closed
3/16/2012	3:15:43 PM	SiCl4 pre valve closed
3/16/2012	3:15:43 PM	SiCl4 post valve closed
3/16/2012	3:15:43 PM	Bypass valve closed
3/16/2012	3:15:43 PM	Bubbler valve closed
3/16/2012	3:15:43 PM	Helium valve opened
3/16/2012	3:15:43 PM	Main Vac valve opened
3/16/2012	3:15:43 PM	Helium MFC set to  20.000000
3/16/2012	3:15:43 PM	H2 MFC set to  0.000000
3/16/2012	3:15:43 PM	BCl3 MFC set to  0.000000
3/16/2012	3:15:43 PM	PH3 MFC set to  0.000000
3/16/2012	3:15:43 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:15:43 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:15:43 PM	Tube furnace set to 0
3/16/2012	3:16:13 PM	Helium valve closed
3/16/2012	3:16:13 PM	H2 valve closed
3/16/2012	3:16:13 PM	BCl3 valve closed
3/16/2012	3:16:13 PM	PH3 valve closed
3/16/2012	3:16:13 PM	SiCl4 pre valve closed
3/16/2012	3:16:13 PM	SiCl4 post valve closed
3/16/2012	3:16:13 PM	Bypass valve closed
3/16/2012	3:16:13 PM	Bubbler valve closed
3/16/2012	3:16:13 PM	Main Vac valve opened
3/16/2012	3:16:13 PM	Helium MFC set to  0.000000
3/16/2012	3:16:13 PM	H2 MFC set to  0.000000
3/16/2012	3:16:13 PM	BCl3 MFC set to  0.000000
3/16/2012	3:16:13 PM	PH3 MFC set to  0.000000
3/16/2012	3:16:13 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:16:13 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:16:13 PM	Tube furnace set to 0
3/16/2012	3:16:43 PM	H2 valve closed
3/16/2012	3:16:43 PM	BCl3 valve closed
3/16/2012	3:16:43 PM	PH3 valve closed
3/16/2012	3:16:43 PM	SiCl4 pre valve closed
3/16/2012	3:16:43 PM	SiCl4 post valve closed
3/16/2012	3:16:43 PM	Bypass valve closed
3/16/2012	3:16:43 PM	Bubbler valve closed
3/16/2012	3:16:43 PM	Helium valve opened
3/16/2012	3:16:43 PM	Main Vac valve opened
3/16/2012	3:16:43 PM	Helium MFC set to  20.000000
3/16/2012	3:16:43 PM	H2 MFC set to  0.000000
3/16/2012	3:16:43 PM	BCl3 MFC set to  0.000000
3/16/2012	3:16:43 PM	PH3 MFC set to  0.000000
3/16/2012	3:16:43 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:16:43 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:16:44 PM	Tube furnace set to 0
3/16/2012	3:17:14 PM	Helium valve closed
3/16/2012	3:17:14 PM	H2 valve closed
3/16/2012	3:17:14 PM	BCl3 valve closed
3/16/2012	3:17:14 PM	PH3 valve closed
3/16/2012	3:17:14 PM	SiCl4 pre valve closed
3/16/2012	3:17:14 PM	SiCl4 post valve closed
3/16/2012	3:17:14 PM	Bypass valve closed
3/16/2012	3:17:14 PM	Bubbler valve closed
3/16/2012	3:17:14 PM	Main Vac valve opened
3/16/2012	3:17:14 PM	Helium MFC set to  0.000000
3/16/2012	3:17:14 PM	H2 MFC set to  0.000000
3/16/2012	3:17:14 PM	BCl3 MFC set to  0.000000
3/16/2012	3:17:14 PM	PH3 MFC set to  0.000000
3/16/2012	3:17:14 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:17:14 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:17:14 PM	Tube furnace set to 0
3/16/2012	3:17:44 PM	H2 valve closed
3/16/2012	3:17:44 PM	BCl3 valve closed
3/16/2012	3:17:44 PM	PH3 valve closed
3/16/2012	3:17:44 PM	SiCl4 pre valve closed
3/16/2012	3:17:44 PM	SiCl4 post valve closed
3/16/2012	3:17:44 PM	Bypass valve closed
3/16/2012	3:17:44 PM	Bubbler valve closed
3/16/2012	3:17:44 PM	Helium valve opened
3/16/2012	3:17:44 PM	Main Vac valve opened
3/16/2012	3:17:44 PM	Helium MFC set to  20.000000
3/16/2012	3:17:44 PM	H2 MFC set to  0.000000
3/16/2012	3:17:44 PM	BCl3 MFC set to  0.000000
3/16/2012	3:17:44 PM	PH3 MFC set to  0.000000
3/16/2012	3:17:44 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:17:44 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:17:44 PM	Tube furnace set to 0
3/16/2012	3:18:14 PM	Helium valve closed
3/16/2012	3:18:14 PM	H2 valve closed
3/16/2012	3:18:14 PM	BCl3 valve closed
3/16/2012	3:18:14 PM	PH3 valve closed
3/16/2012	3:18:14 PM	SiCl4 pre valve closed
3/16/2012	3:18:14 PM	SiCl4 post valve closed
3/16/2012	3:18:14 PM	Bypass valve closed
3/16/2012	3:18:14 PM	Bubbler valve closed
3/16/2012	3:18:14 PM	Main Vac valve opened
3/16/2012	3:18:14 PM	Helium MFC set to  0.000000
3/16/2012	3:18:14 PM	H2 MFC set to  0.000000
3/16/2012	3:18:14 PM	BCl3 MFC set to  0.000000
3/16/2012	3:18:14 PM	PH3 MFC set to  0.000000
3/16/2012	3:18:14 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:18:14 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:18:14 PM	Tube furnace set to 0
3/16/2012	3:18:44 PM	H2 valve closed
3/16/2012	3:18:44 PM	BCl3 valve closed
3/16/2012	3:18:44 PM	PH3 valve closed
3/16/2012	3:18:44 PM	SiCl4 pre valve closed
3/16/2012	3:18:44 PM	SiCl4 post valve closed
3/16/2012	3:18:44 PM	Bypass valve closed
3/16/2012	3:18:44 PM	Bubbler valve closed
3/16/2012	3:18:44 PM	Helium valve opened
3/16/2012	3:18:44 PM	Main Vac valve opened
3/16/2012	3:18:44 PM	Helium MFC set to  20.000000
3/16/2012	3:18:44 PM	H2 MFC set to  0.000000
3/16/2012	3:18:44 PM	BCl3 MFC set to  0.000000
3/16/2012	3:18:44 PM	PH3 MFC set to  0.000000
3/16/2012	3:18:44 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:18:44 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:18:44 PM	Tube furnace set to 0
3/16/2012	3:19:15 PM	Helium valve closed
3/16/2012	3:19:15 PM	H2 valve closed
3/16/2012	3:19:15 PM	BCl3 valve closed
3/16/2012	3:19:15 PM	PH3 valve closed
3/16/2012	3:19:15 PM	SiCl4 pre valve closed
3/16/2012	3:19:15 PM	SiCl4 post valve closed
3/16/2012	3:19:15 PM	Bypass valve closed
3/16/2012	3:19:15 PM	Bubbler valve closed
3/16/2012	3:19:15 PM	Main Vac valve opened
3/16/2012	3:19:15 PM	Helium MFC set to  0.000000
3/16/2012	3:19:15 PM	H2 MFC set to  0.000000
3/16/2012	3:19:15 PM	BCl3 MFC set to  0.000000
3/16/2012	3:19:15 PM	PH3 MFC set to  0.000000
3/16/2012	3:19:15 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:19:15 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:19:15 PM	Tube furnace set to 0
3/16/2012	3:19:45 PM	H2 valve closed
3/16/2012	3:19:45 PM	BCl3 valve closed
3/16/2012	3:19:45 PM	PH3 valve closed
3/16/2012	3:19:45 PM	SiCl4 pre valve closed
3/16/2012	3:19:45 PM	SiCl4 post valve closed
3/16/2012	3:19:45 PM	Bypass valve closed
3/16/2012	3:19:45 PM	Bubbler valve closed
3/16/2012	3:19:45 PM	Helium valve opened
3/16/2012	3:19:45 PM	Main Vac valve opened
3/16/2012	3:19:45 PM	Helium MFC set to  20.000000
3/16/2012	3:19:45 PM	H2 MFC set to  0.000000
3/16/2012	3:19:45 PM	BCl3 MFC set to  0.000000
3/16/2012	3:19:45 PM	PH3 MFC set to  0.000000
3/16/2012	3:19:45 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:19:45 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:19:45 PM	Tube furnace set to 0
3/16/2012	3:20:15 PM	Helium valve closed
3/16/2012	3:20:15 PM	H2 valve closed
3/16/2012	3:20:15 PM	BCl3 valve closed
3/16/2012	3:20:15 PM	PH3 valve closed
3/16/2012	3:20:15 PM	SiCl4 pre valve closed
3/16/2012	3:20:15 PM	SiCl4 post valve closed
3/16/2012	3:20:15 PM	Bypass valve closed
3/16/2012	3:20:15 PM	Bubbler valve closed
3/16/2012	3:20:15 PM	Main Vac valve opened
3/16/2012	3:20:15 PM	Helium MFC set to  0.000000
3/16/2012	3:20:15 PM	H2 MFC set to  0.000000
3/16/2012	3:20:15 PM	BCl3 MFC set to  0.000000
3/16/2012	3:20:15 PM	PH3 MFC set to  0.000000
3/16/2012	3:20:15 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:20:15 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:20:15 PM	Tube furnace set to 0
3/16/2012	3:20:16 PM	Run finished at 3:20 PM
3/16/2012	3:20:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/16/2012	3:24:18 PM	Main Vac valve closed
3/16/2012	3:24:32 PM	Main Vac valve opened
3/16/2012	3:26:41 PM	Recipe started at 3:26 PM
3/16/2012	3:26:41 PM	Helium valve closed
3/16/2012	3:26:41 PM	H2 valve closed
3/16/2012	3:26:41 PM	BCl3 valve closed
3/16/2012	3:26:41 PM	PH3 valve closed
3/16/2012	3:26:41 PM	SiCl4 pre valve closed
3/16/2012	3:26:41 PM	SiCl4 post valve closed
3/16/2012	3:26:41 PM	Main Vac valve closed
3/16/2012	3:26:41 PM	Bypass valve closed
3/16/2012	3:26:41 PM	Bubbler valve closed
3/16/2012	3:26:41 PM	Helium MFC set to  0.000000
3/16/2012	3:26:41 PM	H2 MFC set to  0.000000
3/16/2012	3:26:41 PM	BCl3 MFC set to  0.000000
3/16/2012	3:26:41 PM	PH3 MFC set to  0.000000
3/16/2012	3:26:41 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:26:41 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:26:41 PM	Tube furnace set to 0
3/16/2012	3:26:44 PM	Helium valve closed
3/16/2012	3:26:44 PM	BCl3 valve closed
3/16/2012	3:26:44 PM	PH3 valve closed
3/16/2012	3:26:44 PM	SiCl4 pre valve closed
3/16/2012	3:26:44 PM	SiCl4 post valve closed
3/16/2012	3:26:44 PM	Main Vac valve closed
3/16/2012	3:26:44 PM	Bypass valve closed
3/16/2012	3:26:44 PM	Bubbler valve closed
3/16/2012	3:26:44 PM	H2 valve opened
3/16/2012	3:26:44 PM	Helium MFC set to  0.000000
3/16/2012	3:26:44 PM	H2 MFC set to  500.000000
3/16/2012	3:26:44 PM	BCl3 MFC set to  0.000000
3/16/2012	3:26:44 PM	PH3 MFC set to  0.000000
3/16/2012	3:26:44 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:26:44 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:26:44 PM	Tube furnace set to 0
3/16/2012	3:27:51 PM	Helium valve closed
3/16/2012	3:27:51 PM	BCl3 valve closed
3/16/2012	3:27:51 PM	PH3 valve closed
3/16/2012	3:27:51 PM	SiCl4 pre valve closed
3/16/2012	3:27:51 PM	SiCl4 post valve closed
3/16/2012	3:27:51 PM	Main Vac valve closed
3/16/2012	3:27:51 PM	Bypass valve closed
3/16/2012	3:27:51 PM	H2 valve opened
3/16/2012	3:27:51 PM	Bubbler valve opened
3/16/2012	3:27:51 PM	Helium MFC set to  0.000000
3/16/2012	3:27:51 PM	H2 MFC set to  500.000000
3/16/2012	3:27:51 PM	BCl3 MFC set to  0.000000
3/16/2012	3:27:51 PM	PH3 MFC set to  0.000000
3/16/2012	3:27:51 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:27:51 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:27:51 PM	Tube furnace set to 0
3/16/2012	3:27:52 PM	Helium valve closed
3/16/2012	3:27:52 PM	BCl3 valve closed
3/16/2012	3:27:52 PM	PH3 valve closed
3/16/2012	3:27:52 PM	SiCl4 pre valve closed
3/16/2012	3:27:52 PM	SiCl4 post valve closed
3/16/2012	3:27:52 PM	Main Vac valve closed
3/16/2012	3:27:52 PM	Bypass valve closed
3/16/2012	3:27:52 PM	H2 valve opened
3/16/2012	3:27:52 PM	Bubbler valve opened
3/16/2012	3:27:52 PM	Helium MFC set to  0.000000
3/16/2012	3:27:52 PM	H2 MFC set to  500.000000
3/16/2012	3:27:52 PM	BCl3 MFC set to  0.000000
3/16/2012	3:27:52 PM	PH3 MFC set to  0.000000
3/16/2012	3:27:52 PM	SiCl4 MFC set to  0.000000
3/16/2012	3:27:52 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:27:52 PM	Tube furnace set to 1000
3/16/2012	3:47:52 PM	Helium valve closed
3/16/2012	3:47:52 PM	PH3 valve closed
3/16/2012	3:47:52 PM	Main Vac valve closed
3/16/2012	3:47:52 PM	Bypass valve closed
3/16/2012	3:47:52 PM	H2 valve opened
3/16/2012	3:47:52 PM	BCl3 valve opened
3/16/2012	3:47:52 PM	SiCl4 pre valve opened
3/16/2012	3:47:52 PM	SiCl4 post valve opened
3/16/2012	3:47:52 PM	Bubbler valve opened
3/16/2012	3:47:52 PM	Helium MFC set to  0.000000
3/16/2012	3:47:52 PM	H2 MFC set to  500.000000
3/16/2012	3:47:52 PM	BCl3 MFC set to  1.000000
3/16/2012	3:47:52 PM	PH3 MFC set to  0.000000
3/16/2012	3:47:52 PM	SiCl4 MFC set to  50.000000
3/16/2012	3:47:52 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	3:47:52 PM	Tube furnace set to 1000
3/16/2012	4:07:52 PM	Helium valve closed
3/16/2012	4:07:53 PM	BCl3 valve closed
3/16/2012	4:07:53 PM	PH3 valve closed
3/16/2012	4:07:53 PM	SiCl4 pre valve closed
3/16/2012	4:07:53 PM	SiCl4 post valve closed
3/16/2012	4:07:53 PM	Main Vac valve closed
3/16/2012	4:07:53 PM	Bypass valve closed
3/16/2012	4:07:53 PM	H2 valve opened
3/16/2012	4:07:53 PM	Bubbler valve opened
3/16/2012	4:07:53 PM	Helium MFC set to  0.000000
3/16/2012	4:07:53 PM	H2 MFC set to  500.000000
3/16/2012	4:07:53 PM	BCl3 MFC set to  0.000000
3/16/2012	4:07:53 PM	PH3 MFC set to  0.000000
3/16/2012	4:07:53 PM	SiCl4 MFC set to  0.000000
3/16/2012	4:07:53 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	4:07:53 PM	Tube furnace set to 750
3/16/2012	4:12:53 PM	H2 valve closed
3/16/2012	4:12:53 PM	BCl3 valve closed
3/16/2012	4:12:53 PM	PH3 valve closed
3/16/2012	4:12:53 PM	SiCl4 pre valve closed
3/16/2012	4:12:53 PM	SiCl4 post valve closed
3/16/2012	4:12:53 PM	Main Vac valve closed
3/16/2012	4:12:53 PM	Bypass valve closed
3/16/2012	4:12:53 PM	Helium valve opened
3/16/2012	4:12:53 PM	Bubbler valve opened
3/16/2012	4:12:53 PM	Helium MFC set to  500.000000
3/16/2012	4:12:53 PM	H2 MFC set to  0.000000
3/16/2012	4:12:53 PM	BCl3 MFC set to  0.000000
3/16/2012	4:12:53 PM	PH3 MFC set to  0.000000
3/16/2012	4:12:53 PM	SiCl4 MFC set to  0.000000
3/16/2012	4:12:53 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	4:12:53 PM	Tube furnace set to 0
3/16/2012	4:32:45 PM	Helium valve closed
3/16/2012	4:32:45 PM	H2 valve closed
3/16/2012	4:32:45 PM	BCl3 valve closed
3/16/2012	4:32:45 PM	PH3 valve closed
3/16/2012	4:32:45 PM	SiCl4 pre valve closed
3/16/2012	4:32:45 PM	SiCl4 post valve closed
3/16/2012	4:32:45 PM	Main Vac valve closed
3/16/2012	4:32:45 PM	Bypass valve closed
3/16/2012	4:32:45 PM	Bubbler valve closed
3/16/2012	4:32:45 PM	Helium MFC set to  0.000000
3/16/2012	4:32:45 PM	H2 MFC set to  0.000000
3/16/2012	4:32:45 PM	BCl3 MFC set to  0.000000
3/16/2012	4:32:45 PM	PH3 MFC set to  0.000000
3/16/2012	4:32:45 PM	SiCl4 MFC set to  0.000000
3/16/2012	4:32:45 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	4:32:45 PM	Tube furnace set to 0
3/16/2012	4:32:46 PM	Run finished at 4:32 PM
3/16/2012	4:32:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2012	4:32:52 PM	Recipe started at 4:32 PM
3/16/2012	4:32:52 PM	Helium valve closed
3/16/2012	4:32:52 PM	H2 valve closed
3/16/2012	4:32:52 PM	BCl3 valve closed
3/16/2012	4:32:52 PM	PH3 valve closed
3/16/2012	4:32:52 PM	SiCl4 pre valve closed
3/16/2012	4:32:52 PM	SiCl4 post valve closed
3/16/2012	4:32:52 PM	Main Vac valve closed
3/16/2012	4:32:52 PM	Bypass valve closed
3/16/2012	4:32:52 PM	Bubbler valve closed
3/16/2012	4:32:52 PM	Helium MFC set to  0.000000
3/16/2012	4:32:52 PM	H2 MFC set to  0.000000
3/16/2012	4:32:52 PM	BCl3 MFC set to  0.000000
3/16/2012	4:32:52 PM	PH3 MFC set to  0.000000
3/16/2012	4:32:52 PM	SiCl4 MFC set to  0.000000
3/16/2012	4:32:52 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	4:32:53 PM	Tube furnace set to 0
3/16/2012	4:32:56 PM	H2 valve closed
3/16/2012	4:32:56 PM	BCl3 valve closed
3/16/2012	4:32:56 PM	PH3 valve closed
3/16/2012	4:32:56 PM	SiCl4 pre valve closed
3/16/2012	4:32:56 PM	SiCl4 post valve closed
3/16/2012	4:32:56 PM	Main Vac valve closed
3/16/2012	4:32:56 PM	Bypass valve closed
3/16/2012	4:32:56 PM	Bubbler valve closed
3/16/2012	4:32:56 PM	Helium valve opened
3/16/2012	4:32:56 PM	Helium MFC set to  500.000000
3/16/2012	4:32:56 PM	H2 MFC set to  0.000000
3/16/2012	4:32:56 PM	BCl3 MFC set to  0.000000
3/16/2012	4:32:56 PM	PH3 MFC set to  0.000000
3/16/2012	4:32:56 PM	SiCl4 MFC set to  0.000000
3/16/2012	4:32:56 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	4:32:56 PM	Tube furnace set to 0
3/16/2012	4:32:56 PM	Helium valve closed
3/16/2012	4:32:56 PM	H2 valve closed
3/16/2012	4:32:56 PM	BCl3 valve closed
3/16/2012	4:32:56 PM	PH3 valve closed
3/16/2012	4:32:56 PM	SiCl4 pre valve closed
3/16/2012	4:32:56 PM	SiCl4 post valve closed
3/16/2012	4:32:56 PM	Main Vac valve closed
3/16/2012	4:32:56 PM	Bypass valve closed
3/16/2012	4:32:56 PM	Bubbler valve closed
3/16/2012	4:32:56 PM	Helium MFC set to  0.000000
3/16/2012	4:32:56 PM	H2 MFC set to  0.000000
3/16/2012	4:32:56 PM	BCl3 MFC set to  0.000000
3/16/2012	4:32:56 PM	PH3 MFC set to  0.000000
3/16/2012	4:32:56 PM	SiCl4 MFC set to  0.000000
3/16/2012	4:32:56 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	4:32:56 PM	Tube furnace set to 0
3/16/2012	4:32:57 PM	Run finished at 4:32 PM
3/16/2012	4:32:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2012	4:36:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2012	4:36:47 PM	Recipe started at 4:36 PM
3/16/2012	4:36:47 PM	Helium valve closed
3/16/2012	4:36:47 PM	H2 valve closed
3/16/2012	4:36:47 PM	BCl3 valve closed
3/16/2012	4:36:47 PM	PH3 valve closed
3/16/2012	4:36:47 PM	SiCl4 pre valve closed
3/16/2012	4:36:47 PM	SiCl4 post valve closed
3/16/2012	4:36:47 PM	Main Vac valve closed
3/16/2012	4:36:47 PM	Bubbler valve closed
3/16/2012	4:36:47 PM	Bypass valve opened
3/16/2012	4:36:47 PM	Helium MFC set to  0.000000
3/16/2012	4:36:47 PM	H2 MFC set to  0.000000
3/16/2012	4:36:47 PM	BCl3 MFC set to  0.000000
3/16/2012	4:36:47 PM	PH3 MFC set to  0.000000
3/16/2012	4:36:47 PM	SiCl4 MFC set to  0.000000
3/16/2012	4:36:47 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	4:36:47 PM	Tube furnace set to 0
3/16/2012	4:37:49 PM	Helium valve closed
3/16/2012	4:37:49 PM	H2 valve closed
3/16/2012	4:37:49 PM	BCl3 valve closed
3/16/2012	4:37:49 PM	PH3 valve closed
3/16/2012	4:37:49 PM	SiCl4 pre valve closed
3/16/2012	4:37:49 PM	SiCl4 post valve closed
3/16/2012	4:37:49 PM	Main Vac valve closed
3/16/2012	4:37:49 PM	Bubbler valve closed
3/16/2012	4:37:49 PM	Bypass valve opened
3/16/2012	4:37:49 PM	Helium MFC set to  0.000000
3/16/2012	4:37:49 PM	H2 MFC set to  0.000000
3/16/2012	4:37:49 PM	BCl3 MFC set to  0.000000
3/16/2012	4:37:49 PM	PH3 MFC set to  0.000000
3/16/2012	4:37:49 PM	SiCl4 MFC set to  0.000000
3/16/2012	4:37:49 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	4:37:49 PM	Tube furnace set to 0
3/16/2012	4:38:49 PM	Helium valve closed
3/16/2012	4:38:49 PM	H2 valve closed
3/16/2012	4:38:49 PM	BCl3 valve closed
3/16/2012	4:38:49 PM	PH3 valve closed
3/16/2012	4:38:49 PM	SiCl4 pre valve closed
3/16/2012	4:38:49 PM	SiCl4 post valve closed
3/16/2012	4:38:49 PM	Bypass valve closed
3/16/2012	4:38:49 PM	Bubbler valve closed
3/16/2012	4:38:49 PM	Main Vac valve opened
3/16/2012	4:38:49 PM	Helium MFC set to  0.000000
3/16/2012	4:38:49 PM	H2 MFC set to  0.000000
3/16/2012	4:38:49 PM	BCl3 MFC set to  0.000000
3/16/2012	4:38:49 PM	PH3 MFC set to  0.000000
3/16/2012	4:38:49 PM	SiCl4 MFC set to  0.000000
3/16/2012	4:38:49 PM	Bypass solenoid MFC set to  0.000000
3/16/2012	4:38:49 PM	Tube furnace set to 0
3/16/2012	4:38:50 PM	Run finished at 4:38 PM
3/16/2012	4:38:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2012	5:37:32 PM	Main Vac valve closed
3/16/2012	5:37:33 PM	Main Vac valve opened
3/16/2012	5:37:39 PM	Main Vac valve closed
3/16/2012	5:37:41 PM	Main Vac valve opened
